PFC Emissions Reduction and Process Improvements with Remote Plasma CVD Chamber Cleans

PFC Emissions Reduction and Process Improvements with Remote Plasma CVD Chamber Cleans

著者名:

Mendicino, L. ( (Motorola) )

Brown, P.T. ( (Motorola) )

Filipiak, S. ( (Motorola) )

Nauert, C. ( (Motorola) )

Estep, H. ( (Motorola) )

Fletcher, M. ( (Motorola) )

さらに 1 件

掲載資料名:

Environmental issues with materials and processes for the electronics and semiconductor industries V : proceedings of the international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2002-15

発行年:

2002

開始ページ:

144

終了ページ:

156

総ページ数:

13

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773379 [1566773377]

言語:

英語

請求記号:

E23400/200215

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014049
シリーズID:	PA00000028
会議名:	Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries ; Meeting of the Electrochemical Society
回次:	5th ; 201st
会議開催地:	Philadelphia, PA, USA
会議開催年:	2002.05.00

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