INVITED: CHARACTERIZATION OF SOI WAFERS BY PHOTOLUMINESCENCE

INVITED: CHARACTERIZATION OF SOI WAFERS BY PHOTOLUMINESCENCE

著者名:

掲載資料名:

Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2002-2

発行年:

2002

開始ページ:

815

終了ページ:

828

総ページ数:

14

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773744 [1566773741]

言語:

英語

請求記号:

E23400/2002-2

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014036
シリーズID:	PA00000028
会議名:	International Symposium on Silicon Materials Science and Technology
回次:	9th
会議開催地:	Philadelphia, PA, USA
会議開催年:	2002.05.13-2002.05.17

類似資料:

1 国際会議録 INVITED: CHARACTERIZATION OF SOI WAFERS BY PHOTOLUMINESCENCE Tajima, M., Ibuka, S. Electrochemical Society	7 国際会議録 SOI Wafer characterization and gettering aspects of SOI (invited paper) Kishino, S., Yoshida, H. Electrochemical Society
2 国際会議録 Characterization of SOI wafers by photoluminescence spectroscopy, decay and micro/macro-mapping Tajima, M. Electrochemical Society	8 国際会議録 Rapid Characterization of SiC Crystals by Full-Wafer Photoluminescence Imaging under Below-Gap Excitation H. Isono, M. Tajima, N. Hoshino, H. Sugimoto Trans Tech Publications
3 国際会議録 Luminescence due to electron-hole condensation in silicon-on-insulator and its application to defect and interface characterization Tajima,M., Ibuka,S., Warashina,M. Trans Tech Publications	9 国際会議録 Macroscopic and Microscopic Photoluminescence Mapping System Applicable to 300 mm Wafers Li, Z., Tajima, M., Shimidzu, R. SPIE-The International Society for Optical Engineering
4 国際会議録 Characterization of SiC Epitaxial Wafers by Photoluminescence under Deep UV Excitation Tajima, M., Tanaka, M., Hoshino, N. Trans Tech Publications	10 国際会議録 Macroscopic and Microscopic Photoluminescence Mapping System Applicable to 300mm Wafers Tajima, Z.Li.M., Shimidzu, R. Electrochemical Society
5 国際会議録 Characterization of SiC Epitaxial Wafers by Photoluminescence under Deep UV Excitation Tajima, M., Tanaka, M., Hoshino, N. Trans Tech Publications	11 国際会議録 Electrical characterization of thin SOI wafer Kishino, S., Yashida, H., Uchihashi, T. Electrochemical Society
6 国際会議録 Photoluminescence Mapping of a SiC Wafer in Device Processing Tajima, M., Sugahara, T., Hoshino, N., Tanimoto, S., Takahashi, T., Nakashima, S., Yamamoto, T. Trans Tech Publications	12 国際会議録 Characterization of SiC Wafers by Photohlminescence Mapping Tajima, M., Higashi, E., Hayashi, T., Kinoshita, H., Shiomi, H. Trans Tech Publications

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