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STUDY OF DIFFUSIVITY AND ELECTRICAL PROPERTIES OF Zr AND Hf IN SILICON

著者名:
Vyvenko, O.F.
Sachdeva, R.
Istratov, A.A.
Armitage, R.
Weber, E.R.
Deenapanray, P.N.K.
Jagadish, C.
Gao, Y.
Huff, H.R.
さらに 4 件
掲載資料名:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2002-2
発行年:
2002
開始ページ:
440
終了ページ:
452
総ページ数:
13
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773744 [1566773741]
言語:
英語
請求記号:
E23400/2002-2
資料種別:
国際会議録

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