Modeling of a Silane LPCVD Process Used for Microelectronics and MEMS Fabrication
- 著者名:
- 掲載資料名:
- Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2001-13
- 発行年:
- 2001
- 開始ページ:
- 276
- 終了ページ:
- 283
- 総ページ数:
- 8
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566773195 [1566773199]
- 言語:
- 英語
- 請求記号:
- E23400/200113
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
3
国際会議録
Multiphase reacting flow modeling of singlet oxygen generators for chemical oxygen iodine lasers
Society of Photo-optical Instrumentation Engineers |
Electrochemical Society |
Electrochemical Society |
SPIE - The International Society for Optical Engineering |
Materials Research Society |
American Institute of Chemical Engineers |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |