Gas Phase and Surface Kinetic Processes in Polycrystalline Silicon Hot-Wire Chemical Vapor Deposition

Gas Phase and Surface Kinetic Processes in Polycrystalline Silicon Hot-Wire Chemical Vapor Deposition

著者名:

Holt, J.K.

掲載資料名:

Photovoltaics for the 21st century II : proceedings of the international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2001-10

発行年:

2001

開始ページ:

240

終了ページ:

252

総ページ数:

13

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773164 [1566773164]

言語:

英語

請求記号:

E23400/200110

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014013
シリーズID:	PA00000028
会議名:	Symposium on Photovoltaics for the 21st Century ; Meeting of The Electrochemical Society
回次:	2nd ; 199th
会議開催地:	Washington D.C., USA
会議開催年:	2001.03.00

類似資料:

1 国際会議録 Gas Phase And Surface Kinetic Processes In Hot-Wire Chemical Vapor Deposition Atwater, H. A., Goodwin, D. G., Holt, J. K., Swiatek, M. Materials Research Society	7 国際会議録 Simulation of Hot-Wire Chemical Vapor Deposition of Hydrogenated Amorphous Silicon Goodwin, D.G. Electrochemical Society
2 国際会議録 Radical Species Distributions in Hot-Wire Chemical Vapor Deposition Probed Via Threshold Ionization Mass Spectrometry and Direct Simulation Monte Carlo … Holt, Jason K., Swiatek, Maribeth, Goodwin, David G., Atwater, Harry A., Muller, R.P., Goddard W.A. III Materials Research Society	8 国際会議録 A Phase Diagram for Morphology and Properties of Low Temperature Deposited Polycrystalline Silicon Grown by Hot-Wire Chemical Vapor Deposition Richardson, Christine E., Mason, Maribeth S., Atwater, Harry A. Materials Research Society
3 国際会議録 The Effect Of Aging On Tungsten Filament Surface Kinetics In Hot-Wire Chemical Vapor Deposition Of Silicon Holt, Jason K., Swiatek, Maribeth, Goodwin, David G., Atwater, Harry A. Materials Research Society	9 国際会議録 Manipulation And Control Of Nucleation And Growth Kinetics With Hydrogen Dilution In Hot-Wire CVD Growth Of Poly-Si Atwater, H. A., Goodwin, D. G., Holt, J. K., Swiatek, M. Materials Research Society
4 国際会議録 Quantitative Modelling of Nucleation Kinetics in Experiments for Poly-Si Growth on SiO 2 by Hot-Wire Chemical Vapor Deposition Swiatek, M, Holt, J.K., Atwater, H.A. Electrochemical Society	10 国際会議録 Hot-Wire Chemical Vapor Deposition for Epitaxial Silicon Growth on Large-Grained Polycrystalline Silicon Templates Mason, M. S., Chen, C. M., Atwater, H. A. Materials Research Society
5 国際会議録 High Hydrogen Content Silicon Nitride For Photovoltaic Applications Deposited By Hot-Wire Chemical Vapor Deposition Holt, Jason K., Swiatek, Maribeth, Goodwin, David G., Atwater, Harry A. Materials Research Society	11 国際会議録 A Numerical Model for Hot-Wire Chemical Vapor Deposition of Amorphous Silicon .. Goodwin, D. G. Materials Research Society
6 国際会議録 Quantitative Modeling of Nucleation Kinetics in Experiments For Poly-Si Growth on SiO2 By Hot-Wire Chemical Vapor Deposition Swiatek, Maribeth, Holt, Jason K., Atwater, Harry A. Materials Research Society	12 国際会議録 Hot-Wire Chemical Vapor Deposition Epitaxy on Polycrystalline Silicon Seeds on Glass Charles W. Teplin, Howard M. Branz, Kim M. Jones, Manuel J. Romero, Paul Stradins, Stefan Gall Materials Research Society

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