Fate of Fluorine Emissions from NF3-Based CVD Chamber Cleaning Process

Fate of Fluorine Emissions from NF3-Based CVD Chamber Cleaning Process

著者名:

Vartanian, V. ( (Motorola) )

Goolsby, B. ( (Motorola) )

Mendicino, L. ( (Motorola) )

Brown, PT. ( (Motorola) )

Vires, J. ( (Motorola) )

Raley, D. Babbittand B. ( (Motorola) )

さらに 1 件

掲載資料名:

Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries : proceedings of the fourth International Symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2001-6

発行年:

2001

開始ページ:

78

終了ページ:

93

総ページ数:

16

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773126 [1566773121]

言語:

英語

請求記号:

E23400/2001-6

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014010
シリーズID:	PA00000028
会議名:	Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries ; Meeting of the Electrochemical Society
回次:	4th ; 199th
会議開催地:	Washington, DC.
会議開催年:	2001.03.00

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