XPS Investigation of Oxidation of Cu Seed Layers for Microelectronics Applications

XPS Investigation of Oxidation of Cu Seed Layers for Microelectronics Applications

著者名:

掲載資料名:

State-of-the-art application of surface and interface analysis methods to environmental materials interactions: in honor of James E. Castle's 65th year : proceedings of the international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2001-5

発行年:

2001

開始ページ:

307

終了ページ:

313

総ページ数:

7

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773119 [1566773113]

言語:

英語

請求記号:

E23400/2001-5

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00014009
シリーズID:	PA00000028
会議名:	International symposium on state-of-the-art application of surface and interface analysis methods to environmental materials interactions
回次:	2001
会議開催地:	Washington, DC, USA
会議開催年:	2001.03.26-2001.03.27

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