Blank Cover Image

Physical and Chemical Characterization of Re-Used Oxide CMP Slurry

著者名:
掲載資料名:
Chemical Mechanical Planarization : proceedings of the International Symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2000-26
発行年:
2000
開始ページ:
143
終了ページ:
153
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772938 [1566772931]
言語:
英語
請求記号:
E23400/200026
資料種別:
国際会議録

類似資料:

1 国際会議録 Effect of Organic Acids in Slurry on Copper CMP

Eom, Dae-Hong, Kim, Hyung-Joon, Song, Hyung-Soo, Park, Jin-Goo

Electrochemical Society
7 国際会議録 Frictional Behavior and Particle Adhesion of Abrasive Particles during Cu CMP

Hong, Yi-Koan, Han, Ja-Hyung, Song, Jae-Hoon, Park, Jin-Goo

Materials Research Society
2 国際会議録 Development and Optimization of Slurry for Ru CMP

In-Kwon Kim, Tae-Young Kwon, Jin-Goo Park, Hyung-Soon Park

Materials Research Society
8 国際会議録 Fundamentals of Post-CMP Cleaning

Jin-Goo Park, Tae-Gon Kim

Materials Research Society
3 国際会議録 Effect of Corrosion Inhibitor (BTA) in Citric Acid Based Slurry on Cu CMP

Kim, In-Kwon, Kang, Young-Jae, Hong, Yi-Koan, Park, Jin-Goo

Materials Research Society
9 国際会議録 The Adhesion of Pad Particles on Wafer Surfaces during Cu CMP

Song, Jae-Hoon, Han, Ja-Hyung, Hong, Yi-Koan, Kang, Young-Jae, Park, Jin-Goo, Maeng, Ju-Ho, Won, Young-Man

Materials Research Society
4 国際会議録 The Adsorption Behaviors of Citric Acid on Abrasive Particles in Cu CMP Slurry

Kang, Young-Jae, Hong, Yi-Koan, Song, Jae-Hoon, Kim, In-Kwon, Park, Jin-Goo

Materials Research Society
10 国際会議録 Adhesion Force and Nanotribological Characteristics of Chemical Vapor Deposited Fluorocarbon Films

Kim, Nam-Kyun, Kim, Tae-Gon, Park, Jin-Goo, Kim, Woon-Bae, Shin, Hyung-Jae

Materials Research Society
5 国際会議録 THE REACTION OF OZONE AND H2O2 IN AMMONIUM HYDROXIDE (NH4OH) SOLUTIONS AND THEIR REACTION WITH SILICON WAFERS

Eom, Dae-Hong, Kim, Sang-Yong, Lee, Kang-Kuk, Kim, Ki-Sub, Song, Hyung-Soo, Park, Jin-Goo

Electrochemical Society
11 国際会議録 Effect of Wettability of Poly Silicon on CMP Behavior

Young-Jae Kang, Bong-Kyun Kang, In-Kwon Kim, Jin-Goo Park, Yi-Koan Hong, Sang-Yeob Han, Seong-Kyu Yun, Bo-Un Yoon, …

Materials Research Society
6 国際会議録 Layout Pattern Destiny and Oxide Deposition Profile Effects on Dielectries CMP

Park, Young B., Kim, Joon Y., Seo, Dae W.

Materials Research Society
12 国際会議録 HETEROSTRUCTURAL CHARACTERIZATION OF PSEUDOMORPHIC, PARTIALLY STRAINED, AND HIGHLY MISMATCHED SEMICONDUCTORS USING DOUBLE CRYSTAL X-RAY DIFFRACTION, TEM AND SEM

Kim, Hyung Mun, Kim, Sang-Gi, Nahm, Sahn, Park, Hyung-Ho, Lee, Hae-Kwon, Lee, Jae-Jin, Cho, Kyung-Ik, Choo, Heung Ro, …

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12