The Effect of N2 Plasma Damage on DC and RF Characteristics of HEMTs
- 著者名:
Luo, B. Trivedi, V.P. Ren, F. Hsu, C.H. Pearton, S.J. Abernathy, C.R. Cao, X. Wu, C.S. Hoppe, M. Sasserath, J. Lee, J.W. - 掲載資料名:
- High Speed Compound Semiconductor Devices for Wireless Applications and State-of-the-Art Program on Compound Semiconductors (XXXIII) : proceedings of the International Symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2000-18
- 発行年:
- 2000
- 開始ページ:
- 158
- 終了ページ:
- 170
- 総ページ数:
- 13
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772853 [1566772850]
- 言語:
- 英語
- 請求記号:
- E23400/200018
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
Electrochemical Society |
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |