High Performance, Highly Reliable Gate Oxide Formed with Rapid Thermal Oxidation In-Situ Steam Generation (ISSG) Technique
- 著者名:
Ma, Y. Chen, Y.N. Brown, M.M Li, F. Chen, Y. Eng, J., Jr. Opila, R.L. Chabal, Y.J. Sapjeta, J. Muller, D.A. Xing, G.C. Trowbridge, T. Khau, M. Tam, N. - 掲載資料名:
- Rapid thermal and other short-time processing technologies : proceedings of the international symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 2000-9
- 発行年:
- 2000
- 開始ページ:
- 179
- 終了ページ:
- 186
- 総ページ数:
- 8
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772747 [1566772745]
- 言語:
- 英語
- 請求記号:
- E23400/2000-9
- 資料種別:
- 国際会議録
類似資料:
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8
国際会議録
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