Addressing the Environment, Safety and Health Challenges of the 1999 International Technology Roadmap for Semiconductors

Addressing the Environment, Safety and Health Challenges of the 1999 International Technology Roadmap for Semiconductors

著者名:

Mendicino, L. ( Motorola )
Gibson, S. ( Motorola )

掲載資料名:

Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

2000-7

発行年:

2000

開始ページ:

150

終了ページ:

159

総ページ数:

10

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772723 [1566772729]

言語:

英語

請求記号:

E23400/2000-7

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013976
シリーズID:	PA00000028
会議名:	Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries ; Meeting of the Electrochemical Society
回次:	3rd ; 197th
会議開催地:	Toronto, Ontario, Canada
会議開催年:	2000.05.00

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