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Evaluation of the Applied Materials Remote Clean TM Technology for Lamp Heated CVD Chambers for Perfluorocompound (PFC) Emissions Reduction

著者名:
Mendicino, L. ( Motorola )
Nauert, C. ( Motorola )
Flood, J. ( Motorola )
Brown, P.T. ( Motorola )
Atherton, A. ( Applied Materials )
Nowak, T. ( Applied Materials )
Silvetti, D. ( Applied Materials )
さらに 2 件
掲載資料名:
Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2000-7
発行年:
2000
開始ページ:
42
終了ページ:
51
総ページ数:
10
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772723 [1566772729]
言語:
英語
請求記号:
E23400/2000-7
資料種別:
国際会議録

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