Blank Cover Image

Deuterium/Hydrogen Isotope Effect and Processing for CMOS Technologies

著者名:
Kizilyalli, I.  
掲載資料名:
The physics and chemistry of SiO2 and the Si-SiO2 interface-4, 2000 : proceedings of the fourth International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface, Tronto, Canada, May 15-18, 2000
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
2000-2
発行年:
2000
開始ページ:
47
終了ページ:
56
総ページ数:
10
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772679 [1566772672]
言語:
英語
請求記号:
E23400/2000-2
資料種別:
国際会議録

類似資料:

1 国際会議録 Origin of the Hydrogen/Deuterium (H/D) Isotope Effect of Hot-Electron Degradation of MOS Devices

Chen, Zhi, Guo, Jun, Ong, Pangleen

Materials Research Society
7 国際会議録 Application of the Metal Hydride Activation Effect of Hydrogen Isotopes for Plasma Chemical Technologies

Shmal 'ko, Yu.F., Klochko, Ye. V.

Kluwer Academic Publishers
2 国際会議録 Manufacturing multilevel metal CMOS with deuterium anneals for improved hot-carrier reliablility

Kizilyalli,I.C., Abein,G., Chen,Z., Weber,G.R., Register,F., Harris,E., Chetlur,S., Higashi,G.S., Schofieled,M., Sen,S., …

SPIE-The International Society for Optical Engineering
8 国際会議録 Deuterium Sintering of CMOS Technology for Improved Hot Carrier Reliability

Lee, J., Chen, Z., Hess, K., Lyding, J. W.

MRS - Materials Research Society
3 国際会議録 Mechanistic Investigations of Condensed Phase Energetic Material Decomposition Processes using the Kinetic Deuterium Isotope Effect

Shackelford Scott A.

Kluwer
9 国際会議録 Stacked Si02-Ta2O5 Gate Dielectrics for CMOS

Kizilyalli, I.C., Roy, P.K.

Electrochemical Society
4 国際会議録 Mechanistic Relationships of the Decomposition Process to Combustion and Explosion Events from Kinetic Deuterium Isotope Effect Investigations

Shackelford Scott A.

Kluwer
10 国際会議録 The Effect of Hydrogen/Deuterium Introduction on Photoluminescence of 3C-SiC Crystals

Lee, B. K., Steckl, A. J., Zavada, J. M., Wilson, R. G.

MRS - Materials Research Society
5 国際会議録 Hydrogen/Deuterium Interaction With CMOS Transistor Device Structure: Sintering Process Studied by SIMS

Chen, P. J., Wallace, R. M.

MRS - Materials Research Society
11 国際会議録 Effect on the cw hydrogen/deuterium fluoride chemical laser with different diluents

Jiang,Z., Hua,W., Chen,J., Zhao,Y.

SPIE-The International Society for Optical Engineering
6 国際会議録 Deuterium passivation in CMOS technology (invited paper)

Lyding, J. W., Lee, J., Cheng, K., Albrecht, P. M., Ruppalt, L. B., Hess, K.

Electrochemical Society
12 国際会議録 Isotope effect on the electronic structure of hydrogen in metals

Jena, P., Satterthwaite, C.B.

North Holland
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12