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Silicon Nitride Polish-Stop for CMP of BPSG Films on sub-0.25μm DRAMs

著者名:
Stephens, J.
Dobuzinsky, D.
Gambina, J.
Glashauser, W.
Huckels, K.
Hanebeck, J.
Kraxenberger, M.
Naeem, M.
Rupp, T.
Sardesai, V.
Wangemann, K.
Wise, M.
さらに 7 件
掲載資料名:
Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
99-37
発行年:
1999
開始ページ:
234
終了ページ:
238
総ページ数:
5
出版情報:
Pennington, N. J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772600 [1566772605]
言語:
英語
請求記号:
E23400/99-37
資料種別:
国際会議録

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