Oxidation Induced Crystalline Defects in Bonded SOI Wafers
- 著者名:
Papakonstantinou, P. Somasundram, K. Cao, X. Quinn, C. Yallup, K. Nevin, W.A. Blackstone, S. - 掲載資料名:
- Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 99-35
- 発行年:
- 1999
- 開始ページ:
- 178
- 終了ページ:
- 186
- 総ページ数:
- 9
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772587 [1566772583]
- 言語:
- 英語
- 請求記号:
- E23400/99-35
- 資料種別:
- 国際会議録
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