Nucleation of Diamond on Si Cones by Biased Hot Filament Chemical Vapor Deposition

Nucleation of Diamond on Si Cones by Biased Hot Filament Chemical Vapor Deposition

著者名:

掲載資料名:

Diamond materials : proceedings of the sixth international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

99-32

発行年:

1999

開始ページ:

120

終了ページ:

125

総ページ数:

6

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772556 [1566772559]

言語:

英語

請求記号:

E23400/99-32

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013960
シリーズID:	PA00000028
会議名:	International Symposium on Diamond Materials ; Meeting of the Electrochemical Society
回次:	6th ; 196th
会議開催地:	Honolulu, Hawaii, USA
会議開催年:	1999.10.17-1999.10.22

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