An Overview of FeRAM Technology for High Density Applications | 東京工業大学附属図書館文献データベース

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An Overview of FeRAM Technology for High Density Applications

著者名:

さらに 5 件

掲載資料名:

ULSI process integration : proceedings of the first international symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

99-18

発行年:

1999

開始ページ:

73

終了ページ:

88

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772419 [1566772419]

言語:

英語

請求記号:

E23400/99-18

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013947
シリーズID:	PA00000028
会議名:	International Symposium on ULSI Process Integration ; Meeting of the Electrochemical Society
回次:	1st ; 196th
会議開催地:	Honolulu, Hawaii, USA
会議開催年:	1999.10.17-1999.10.22

類似資料:

1 国際会議録 An Overview of FERAM Technology for High Density Applications Nagel, Nicolas, Mikolajick, Thomas, Kasko, Igor, Hartner, Walter, Moert, Manfred, Pinnow, Cay-Uwe, Dehm, Christine, … Materials Research Society	7 国際会議録 INFLUENCE OF LOW-DOSE ION-BEAM MIXING ON GoSi2 FORMATION Kasko, I., Dehm, C., Ryssel, H. Materials Research Society
2 国際会議録 CHARACTERIZATION OF NOVEL HIGH ε DIELECTRIC AND FERROELECTRIC FILMS BY SCANNING PROBE MICROSCOPY (SPM) TECHNIQUES Landau, S., Kolbesen, B.O., Tillman, R., Bruchhaus, R., Olbrich, A., Fritsch, B., Dehm, C., Schindler, G., Hartner, W., … Electrochemical Society	8 国際会議録 Applications of Bonding SOI Technology to High Performance LSI Circuits Yoshimi, M., Letertre, F., Cayrefourcq, I., Mazure, C.(Invited) Electrochemical Society
3 国際会議録 Scanning Probe Microscopy (SPM) for the Investigation of Local Electrical Properties of High-K Dielectric/Ferroelectric Films Landau, S. A., Weiss, P-A., Junghans, N., Kolbesen, B. O., Adderton, D., Schindler, G., Hartner, W., Hintermaier, F., … MRS - Materials Research Society	9 国際会議録 Reversible and Irreversible Contributions to the Polarization in SrBi2Ta2O9 Ferroelectric Capacitors Lohse, O., Bolten, D., Grossmann, M., Waser, R., Hartner, W., Schindler, G. MRS - Materials Research Society
4 国際会議録 Origin of Imprint in Ferroelectric CSD SrBi2Ta2O9 Thin Films Grossmann, M., Lohse, O., Bolten, D., Waser, R., Hartner, W., Schindler, G., Nagel, N., Dehm, C. MRS - Materials Research Society	10 国際会議録 Electrodes and Barriers for DRAM and FERAM: Processing, Integration, and Fundamentals Saenger, K.L., Andricacos, P.C., Athavale, S.D., Baniecki, J.D., Cabral, C., Jr., Costrini, G., Kwietniak, K.T., … Materials Research Society
5 国際会議録 Characterization of High K Dielectric/Ferroelectric Materials:Capabilities of Scanning Probe Microscopy(SPM) Landau,S.A., Weiｦﾂ,P.-A., Junghaus,N., Kolbesen,B.O., Adderton,D., Wolf,P.De, Schindier,G., Hartner,W., … SPIE - The International Society for Optical Engineering	11 国際会議録 INTERACTION BETWEEN Co AND SiO2 DURING ION-BEAM MIXING AND RAPID THERMAL ANNEALING Dehm. C., Kasko, I., Burte, E. P., Ryssel, H. Materials Research Society
6 国際会議録 Temperature dependence of the reversible and irreversible polarization contribution in ferroelectric thin films Bolten, D., Bottger, U., Grossmann, M., Lohse, O., Waser, R., Kastner, M., Schindler, G., Dehm, C. MRS-Materials Research Society	12 国際会議録 Overview of the calibration and the performance of the pn-CCD camera Briel,U.G., Bihler,E., Brauninger,H.W., Colli,M., Dennerl,K., Haberl,F., Hartmann,R., Hartner,G.D., Holl,P., … SPIE - The International Society for Optical Engineering

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