Emissivity of Bare and Coated Si Wafers: Theoretical Studies

Emissivity of Bare and Coated Si Wafers: Theoretical Studies

著者名:

掲載資料名:

Advances in rapid thermal processing : proceedings of the symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

99-10

発行年:

1999

開始ページ:

427

終了ページ:

434

総ページ数:

8

出版情報:

Pennington, N. J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772327 [156677232X]

言語:

英語

請求記号:

E23400/99-10

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013940
シリーズID:	PA00000028
会議名:	International symposium on advances in rapid thermal processing ; Meeting of Electrochemical Society
回次:	1999 ; 195th
会議開催地:	Seattle, WA, USA
会議開催年:	1999.05.03-1999.05.06

類似資料:

1 国際会議録 Theoretical Analysis of the Minority Carrier Lifetime in a Multicrystalline Water With Spatially Varying Defect Distribution Sopori, B., Chen, W., Ravindra, N. M. MRS - Materials Research Society	7 国際会議録 A Thin Silicon Solar Cell on Glass: Cell Design and Process Physics Chen, W., Sopori, B. Electrochemical Society
2 国際会議録 Emissivity Studies on Polycrystalline Silicon and a-Si/SiO2/Si Chen, W., Oh, M., Abedrabbo, S., Tong, F. M., Schmidt, W., Narayanan, S., Sopori, B., Ravindra, N. M. MRS - Materials Research Society	8 国際会議録 Trapping And Detrapping Of H In Si: Impact On Diffusion Properties And Solar Cell Processing Sopori, Bhushan, Zhang, Y., Reedy, R., Jones, K., Ravindra, N.M., Rangan, S., Ashok, S. Materials Research Society
3 国際会議録 Grain Enhancement of Polycrystalline Silicon Films Aided by Optical Excitation Sopori, B. L., Chen, W., Alleman, J., Matson, R., Ravindra, N. M., Tan, T. Y. MRS - Materials Research Society	9 国際会議録 Estimation of Emissivity of a Wafer in an RTP Chamber by a Dynamic Observer Belikov, Sergey, Hur, David, Friedland, Bernard, Ravindra, N. M. MRS - Materials Research Society
4 国際会議録 Grain Enhancement of Thin Silicon Layers Using Optical Processing Sopori, B. L., Alleman, Jeff, Chen, W., Tan, T. Y., Ravindra, N. M. MRS - Materials Research Society	10 国際会議録 Temperature Dependent Emissivity on Multilayers of Silicon Abedrabbo, S., Ravindra, N. M., Chen, W., Rajasekhar, V., Golota, T., Gokce, O. H., Nguyenphu, A. T. Fiory B., Nanda, … MRS - Materials Research Society
5 国際会議録 Issues in Emissivity of Silicon Abedrabbo, S., Hensel, J. C., Gokce, O. H., Tong, F. M., Sopori, B., Fiory, A. T., Ravindra, N. M. MRS - Materials Research Society	11 国際会議録 Computer Simulation of Edge Effects in a Small-Area Mesa N-P Junction Diode Jesse Appel, Bhushan Sopori, N.M. Ravindra Materials Research Society
6 国際会議録 PV Optics: An Optical Modeling Tool for Solar Cell and Module Design Sopori, B., Madjdpour, J., Zhang, Y., Chen, W. Electrochemical Society	12 国際会議録 The study of phase angle effects to wafer process window using 193-nm EAPSM in a 300-mm wafer manufacturing environment Chou, W.Y., Yen, S.M., Wu, J.K., Shieh, W.B., Chuang, M., Fan, G., Tseng, C.C., Hughes, G.P., MacDonald, S.S., Holiday, … SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12