Thermal Stability Improvement of Cobalt Disilicide Thin Films on (001)Si by High Temperature Sputtering Deposition
- 著者名:
- 掲載資料名:
- Advances in rapid thermal processing : proceedings of the symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 99-10
- 発行年:
- 1999
- 開始ページ:
- 257
- 終了ページ:
- 262
- 総ページ数:
- 6
- 出版情報:
- Pennington, N. J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772327 [156677232X]
- 言語:
- 英語
- 請求記号:
- E23400/99-10
- 資料種別:
- 国際会議録
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6
国際会議録
Effects of dc Bias on the Thermal Stability of dc Inline Sputtered CoCrTa/Cr Thin-Films Media
MRS - Materials Research Society |
Trans Tech Publications |