Attainment of Low Resistivity Polycide Films Using Rapid Thermal Annealing
- 著者名:
Yoon, H.A. Chen, C. Singhal, A. Lapes, D. Miner, G. Hong, S. Yamazaki, M. Maeda, Y. - 掲載資料名:
- Advances in rapid thermal processing : proceedings of the symposium
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 99-10
- 発行年:
- 1999
- 開始ページ:
- 249
- 終了ページ:
- 256
- 総ページ数:
- 8
- 出版情報:
- Pennington, N. J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772327 [156677232X]
- 言語:
- 英語
- 請求記号:
- E23400/99-10
- 資料種別:
- 国際会議録
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