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Electrochemical Codeposition and Electrical Characterization of a Copper - Zinc Alloy Metallization

著者名:
掲載資料名:
Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
99-9
発行年:
1999
開始ページ:
212
終了ページ:
220
総ページ数:
9
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772310 [1566772311]
言語:
英語
請求記号:
E23400/99-9
資料種別:
国際会議録

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