Diffusion of Iron Contamination in Silicon Dioxide

Diffusion of Iron Contamination in Silicon Dioxide

著者名:

掲載資料名:

Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

99-6

発行年:

1999

開始ページ:

219

終了ページ:

222

総ページ数:

4

出版情報:

Pennington, New Jersey: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772280 [1566772281]

言語:

英語

請求記号:

E23400/99-6

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013936
シリーズID:	PA00000028
会議名:	Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
回次:	5th
会議開催地:	Seattle, WA, USA
会議開催年:	1999.05.02-1999.05.07

類似資料:

1 国際会議録 Surface photovoltage analysis of iron contamination in silicon processing and the relation to gate oxide integrity Henley,W.B. SPIE-The International Society for Optical Engineering	7 国際会議録 Theory of Oxide Defects Near The Silicon-Silicon Dioxide Interface Fowler, W.B., Chu, A.X., Snyder, K.C., Edwards, A.H. Electrochemical Society
2 国際会議録 Iron Precipitation and Dissolution in Float-Zone silicon Ramappa, Deepak A., Henley, Worth B. MRS - Materials Research Society	8 国際会議録 Origin of Goss Texture during Secondary Recrystallisation in Silicon-Steel W.B. Hutchinson Trans Tech Publications
3 国際会議録 EFFECTS OF RESIDUAL IRON CONTAMINATION INTRODUCED DURING WET CHEMICAL PROCESSING ON THIN OXIDE BREAKDOWN AND RELIABILITY CHARACTERISTICS Henley, W.B., Jastrzebski, L., Haddad, N.F. Electrochemical Society	9 国際会議録 Gamma Large Area Silicon Teleccope Applying Sl Strip Detector Technology to the Detection of Gamma-Rays in Space Atwood, W.B., &al ESA Publications Division
4 国際会議録 MONITORING IRON CONTAMINATION IN SILICON BY SURFACE PHOTOVOLTAGE AND CORRELATION TO GATE OXIDE INTEGRITY Henley, Worth B., Jastrzebski, Lubek, Haddad, Nadim F. MRS - Materials Research Society	10 国際会議録 KINETICS OF CARRIER-INDUCED METASTABLE DEFECT FORMATION IN HYDROGENATED AMORPHOUS SILICON Jackson, W.B., Moyer, M.D. Materials Research Society
5 国際会議録 Theory of Impurity Interactions in Silicon Dioxide Fowler,W.B., Edwards,A.H. Trans Tech Publications	11 国際会議録 Derivation and Application for Calculation of Carbon Content in Austenitizing of Cast Iron W.B. Gong, L. Luo, G.D. Chen, G.Y. Xiang Trans Tech Publications
6 国際会議録 THE EFFECT OF IRON CONTAMINATION ON THIN OXIDE BREAKDOWN - EXPERIMENTAL AND MODELING Henley, Worth B., Jastrzebski, Lubek, Haddad, Nadim F. Materials Research Society	12 国際会議録 Iron Diffusion Profile Studies by Surface Photo-Voltage for Silicon Iron Implanted Wafers After Rapid Thermal Anneal I. Rapoport, P. Taylor, S. Kim, B. Orschel, W. Huber Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12