Inductively-Coupled Plasma Deposition of Low Temperature Silicon Dioxide and Silicon Nitride Films for III-V Applications
- 著者名:
- 掲載資料名:
- Proceedings of the State-of-the-Art Program on Compound Semiconductors (SOTAPOCs XXX)
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 99-4
- 発行年:
- 1999
- 開始ページ:
- 1
- 終了ページ:
- 12
- 総ページ数:
- 12
- 出版情報:
- Pennington, N. J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772266 [1566772265]
- 言語:
- 英語
- 請求記号:
- E23400/99-4
- 資料種別:
- 国際会議録
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