Characterisation of SOI Thin Film Transistors Fabricated Using SiGe Etch Stop Layers
- 著者名:
Uppal, S ( (Qucenis University of Belfast) ) Gay, D ( (BCO Technologies Ltd) ) Armstrong, G A ( (Queenfs University of Belfast) ) McNeill, D W ( (Queenfs University of Belfast) ) Baine, P ( (Queenfs University of Belfast) ) Armstrong, B M ( (Queenfs University of Belfast) ) Gamble, H S ( (Queenfs University of Belfast) ) Yallup, K ( (BCO Technologies Ltd) ) - 掲載資料名:
- Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 99-3
- 発行年:
- 1999
- 開始ページ:
- 219
- 終了ページ:
- 224
- 総ページ数:
- 6
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772259 [1566772257]
- 言語:
- 英語
- 請求記号:
- E23400/99-3
- 資料種別:
- 国際会議録
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