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Characterisation of SOI Thin Film Transistors Fabricated Using SiGe Etch Stop Layers

著者名:
Uppal, S ( (Qucenis University of Belfast) )
Gay, D ( (BCO Technologies Ltd) )
Armstrong, G A ( (Queenfs University of Belfast) )
McNeill, D W ( (Queenfs University of Belfast) )
Baine, P ( (Queenfs University of Belfast) )
Armstrong, B M ( (Queenfs University of Belfast) )
Gamble, H S ( (Queenfs University of Belfast) )
Yallup, K ( (BCO Technologies Ltd) )
さらに 3 件
掲載資料名:
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
99-3
発行年:
1999
開始ページ:
219
終了ページ:
224
総ページ数:
6
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772259 [1566772257]
言語:
英語
請求記号:
E23400/99-3
資料種別:
国際会議録

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