Non-Contact Electrical Characterisation of SOI Surfaces
- 著者名:
- Lukasiak, L ( (Warsaw University of Technology) )
- Roman, P ( (Penn Slate University), )
- Brubaker, M ( (Penn Slate University), )
- Anc, M ( (IBIS Technology) )
- Ruzyllo, I ( (Penn State University) )
- 掲載資料名:
- Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 99-3
- 発行年:
- 1999
- 開始ページ:
- 184
- 終了ページ:
- 188
- 総ページ数:
- 5
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772259 [1566772257]
- 言語:
- 英語
- 請求記号:
- E23400/99-3
- 資料種別:
- 国際会議録
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9
国際会議録
Characterization of High-K Dielectrics Using the Non-Contact Surface Charge Profiler (SCP) Method
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