Recent Progress in Low-Dose SIMOX Wafers Fabricated with Lateral-Thermal Oxidation (ITOX) Process (Invited)
- 著者名:
Matsumura, A ( (Nippon Steel Corporation) ) Kawamura, K ( (Nippon Steel Corporation) ) Mizutani, T ( (Nippon Steel Corporation) ) Takaysma, S ( (Nippon Steel Corporation) ) Hamaguchi, I ( (Nippon Steel Corporation) ) Nagatake, Y ( (Nippon Steel Corporation) ) - 掲載資料名:
- Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 99-3
- 発行年:
- 1999
- 開始ページ:
- 79
- 終了ページ:
- 92
- 総ページ数:
- 14
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772259 [1566772257]
- 言語:
- 英語
- 請求記号:
- E23400/99-3
- 資料種別:
- 国際会議録
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5
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