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Recent Progress in Low-Dose SIMOX Wafers Fabricated with Lateral-Thermal Oxidation (ITOX) Process (Invited)

著者名:
Matsumura, A ( (Nippon Steel Corporation) )
Kawamura, K ( (Nippon Steel Corporation) )
Mizutani, T ( (Nippon Steel Corporation) )
Takaysma, S ( (Nippon Steel Corporation) )
Hamaguchi, I ( (Nippon Steel Corporation) )
Nagatake, Y ( (Nippon Steel Corporation) )
さらに 1 件
掲載資料名:
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
99-3
発行年:
1999
開始ページ:
79
終了ページ:
92
総ページ数:
14
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772259 [1566772257]
言語:
英語
請求記号:
E23400/99-3
資料種別:
国際会議録

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