Amorphous Hydrogenated SiC Films Produced by a Dual/Mixed Frequency Plasma-Enhanced CVD Reactor
- 著者名:
Liaw, H.M. Williams, P. Cave, N. Deal, P. Saha, N. Gregory, R. - 掲載資料名:
- Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 98-23
- 発行年:
- 1998
- 開始ページ:
- 425
- 終了ページ:
- 431
- 総ページ数:
- 7
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772174 [1566772176]
- 言語:
- 英語
- 請求記号:
- E23400/98-23
- 資料種別:
- 国際会議録
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