Synthesis and Decomposition Kinetics of Liquid Precursors for Chemical Vapor Deposition (CVD) of Barium
- 著者名:
Gordon, R.G. Barry, S.T. Broomball-Dillard, R.N.R. DiCeglie, Jr.N. Liu, X. Teff, D.J. - 掲載資料名:
- Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 98-23
- 発行年:
- 1998
- 開始ページ:
- 270
- 終了ページ:
- 279
- 総ページ数:
- 10
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772174 [1566772176]
- 言語:
- 英語
- 請求記号:
- E23400/98-23
- 資料種別:
- 国際会議録
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