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Reaction Products of AI-CVD from Dimethyl-Aluminumhydride Observed by Infrared Spectroscopy

著者名:
Suglyama, M.
Shimogaki, Y.
Itoh, H.
Aoyama, J.
Toshimi, T.
Komiyama, H.
さらに 1 件
掲載資料名:
Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
98-23
発行年:
1998
開始ページ:
252
終了ページ:
257
総ページ数:
6
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772174 [1566772176]
言語:
英語
請求記号:
E23400/98-23
資料種別:
国際会議録

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