Tetrahedrally Bonded Amorphous Carbon for Use in Thin Film Transistors*
- 著者名:
Milne, W.I. Clough, F.J. Kleinsorge, B. Maeng, S.L. Uchikoga, S. Robertson, J. - 掲載資料名:
- Proceedings of the fourth Symposium on Thin Film Transistor Technologies
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 98-22
- 発行年:
- 1998
- 開始ページ:
- 299
- 終了ページ:
- 308
- 総ページ数:
- 10
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772167 [1566772168]
- 言語:
- 英語
- 請求記号:
- E23400/98-22
- 資料種別:
- 国際会議録
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12
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Low Temperature Growth of High Quality SiO2 at Less Than 100℃ By ECR-PECVD For Thin Film Transistors
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