Polysilicon TFT Hydrogenation Using a Backside Nitride Layer

Polysilicon TFT Hydrogenation Using a Backside Nitride Layer

著者名:

掲載資料名:

Proceedings of the fourth Symposium on Thin Film Transistor Technologies

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

98-22

発行年:

1998

開始ページ:

185

終了ページ:

190

総ページ数:

6

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772167 [1566772168]

言語:

英語

請求記号:

E23400/98-22

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013925
シリーズID:	PA00000028
会議名:	Symposium on Thin Film Transistor Technologies - TFTT
回次:	4th
会議開催地:	Boston, Massachusetts, USA
会議開催年:	1998.11.02-1998.11.04

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