Through-Mask Electrochemical Micromachining of Titanium

Through-Mask Electrochemical Micromachining of Titanium

著者名:

掲載資料名:

Proceedings of the International Symposium on Microstructures and Microfabricated Systems IV

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

98-14

発行年:

1998

開始ページ:

158

終了ページ:

167

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772068 [1566772060]

言語:

英語

請求記号:

E23400/98-14

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013917
シリーズID:	PA00000028
会議名:	International Symposium on Microstructures and Microfabricated Systems ; Meeting of the Electrochemical Society
回次:	4th ; 194th
会議開催地:	Boston, Massachusetts, USA
会議開催年:	1998.11.01-1998.11.06

類似資料:

1 国際会議録 57. Production of Titanium Controlled Surface Topographies for Biological Applications Madore, C., Landolt, D. Electrochemical Society	7 国際会議録 Electrochemical Study of the Corrosion Behavior of PVD Coatings of Different Microstructure Robyr,C., Agarwal,P., Mettraux,P., Landolt,D. Trans Tech Publications
2 国際会議録 43. AC Impedance Study of Blocking Inhibitors in Cathodic Leveling Madore, C., Agarwal, P., Landolt, D. Electrochemical Society	8 国際会議録 Investigation of Island Formation Problem During Through-Mask Electrochemical Micromachining Shenoy, R.V., Datta, M., Romankiw, L.T. Electrochemical Society
3 国際会議録 13 Electrochemical engineering aspects of microfabrication Landolt, D. Electrochemical Society	9 国際会議録 20 Hazardous Waste Reduction Through Electrochemical Micromachining Harris, D., Brophy, D., Datta, M. Electrochemical Society
4 国際会議録 Microstructural Aspects of Metal and Alloy Films Fabricated Electrochemically or by Sputter Deposition Landolt, D. Electrochemical Society	10 国際会議録 Investigation of Tribocorrosion of TiC Coatings using Electrochemical Techniques Mischler,S., Ayrault,S., Landolt,D. Trans Tech Publications
5 国際会議録 Through-mask electrochemical micromachining of thin metallic Datta, M., Romankiw, L.T. Electrochemical Society	11 国際会議録 17 Effect of mask wall angle on shape evolution during through-mask electrochemical micromachining Shenoy, R.V., Datta, M. Electrochemical Society
6 国際会議録 Microfabrication by through-mask electrochemical micromachining (Invited Paper) Datta,M. SPIE-The International Society for Optical Engineering	12 国際会議録 44. A Study of the Mo Codeposition Mechanism by Electrochemical Impedance Spectroscopy Podlaha, E.J., Agarwal, P., Landolt, D. Electrochemical Society

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