Blank Cover Image

Chemical Mechanical Polishing: An Enabling Fabrication Process for Surface Micromachining Technologies

著者名:
Sniegowski, Jeffry J.  
掲載資料名:
Proceedings of the International Symposium on Microstructures and Microfabricated Systems IV
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
98-14
発行年:
1998
開始ページ:
1
終了ページ:
11
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772068 [1566772060]
言語:
英語
請求記号:
E23400/98-14
資料種別:
国際会議録

類似資料:

1 国際会議録 Improved polysilicon surface-micromachined micromirror devices using chemical-mechanical polishing

Hetherington, Dale L., Sniegowski, Jeffry J.

SPIE
7 国際会議録 In-line monitoring of chemical-mechanical polishing processes

Hetherington,D.L., Stein,D.J.

SPIE - The International Society for Optical Engineering
2 国際会議録 Chemical-mechanical polishing:enhancing the manufacturability of MEMS

Sniegowski,J.J.

SPIE-The International Society for Optical Engineering
8 国際会議録 Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology (Invited Paper)

Smith,J.H., Rodgers,M.S., Sniegowski,S.L., Miller,S.L., Hetherington,D.L., McWhorter,P.J., Warren,M.E.

SPIE-The International Society for Optical Engineering
3 国際会議録 Surface-Particle Interactions in the Chemical Mechanical Polishing Process

Adler, J. J., Rabinovich, Y. I., Singh, R. K., Moudgil, B. M.

MRS - Materials Research Society
9 国際会議録 Micromachined Shear Stress Sensors for Characterization of Surface Forces During Chemical Mechanical Polishing

Andrew Mueller, Robert White, Vincent Manno, Chris Rogers, Sriram Anjur, Mansour Moinpour

Materials Research Society
4 国際会議録 Integrated mold/surface-micromachining process

Barron,C.C., Fleming,J.G., Montague,S., Sniegowski,J.J., Hetherington,D.L.

SPIE-The International Society for Optical Engineering
10 国際会議録 Performance trade-offs for a surface micromachined microengine

Miller,S.L., Sniegowski,J.J., LaVigne,G., McWhorter,P.J.

SPIE-The International Society for Optical Engineering
5 国際会議録 Material and processing issues for the monolithic integration of microelectronics with surface-micromachined polysilicon sensors and actuators

Smith,J.H., Montague,S., Sniegowski,J.J.

SPIE-The International Society for Optical Engineering
11 国際会議録 Chemical vapor deposition coating for micromachines

Mani, S. S., Fleming, J. G., Sniegowski, J. J., Boer, M. P. de, Irwin, L. W., Walraven, J. A., Tanner, D. M., Dugger, M. …

MRS-Materials Research Society
6 国際会議録 Friction in surface-micromachined microengines

Miller,S.L., Sniegowski,J.J., LaVigne,G., McWhorter,P.J.

SPIE-The International Society for Optical Engineering
12 国際会議録 Laser fabrication technology for micromachines

Chen, J.M., Chen, T., Wang, X.B., Zuo, T.C.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12