Blank Cover Image

High Speed Polishing of Silicon Dioxide Thin Films Using Linear Planarization Technology

著者名:
Thornton, B.
Nagengast, A.
Pallinti, J.
Pant, A.
Jairath, R.
Krusell, W.
さらに 1 件
掲載資料名:
Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
98-7
発行年:
1998
開始ページ:
90
終了ページ:
97
出版情報:
Pennington, N. J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772013 [156677201X]
言語:
英語
請求記号:
E23400/98-7
資料種別:
国際会議録

類似資料:

1 国際会議録 A High Performance Amorphous Silicon Thin Film Transistor With a Planarized Gate

Lim, B.C., Choi, Y.J., Jang, J.

Electrochemical Society
7 国際会議録 TUNNELING CURRENT IN THIN SILICON DIOXIDE FILMS

Zafar, S., Poler, J. C., Irene, E. A., Xu, X., Hames, G., Kuehn, R., Wortman, J. J.

MRS - Materials Research Society
2 国際会議録 High-Speed Chemical Polishing of Diamond Films

Jin, S., Zhu, W., Graebner, J.E.

Electrochemical Society
8 国際会議録 Process Analysis and Modeling of Thin Silicon Film Deposition by Hot-Wire Chemical Vapor Deposition

Aparicio, R., Birkmire, R., Pant, A., Huff, M., Russell, T.W.F.

Electrochemical Society
3 国際会議録 The Influence of pH and Temperature on Polish Rates and Selectivity of Silicon Dioxide and Nitride Films

America, W. G., Babu, S. V., Srinivasan, R.

Materials Research Society
9 国際会議録 High Speed Sensing Using an Ellipsometer for Investigation of Thin Films and Surfaces

Weir, K., Chitaree, R., Grattan, K.T.V., Palmer, A.W.

Electrochemical Society
4 国際会議録 CHEMICAL MECHANICAL POLISHING FOR PLANARIZATION IN MANUFACTURING ENVIRONMENT

Desai, Mukesh, Jairath, Rahul, Stell, Matt, Tolles, Robert

MRS - Materials Research Society
10 国際会議録 Low-Temperature, High-Quality Silicon Dioxide Thin Films Deposited Using Tetramethylsilane (TMS)

Reber, D. M., Fonash, S. J.

MRS - Materials Research Society
5 国際会議録 Silicon Dioxide Insulating Films for Silicon- Germanium Technology

Vijh, A., Kapoor, V.J., Patterson, R.L., Dickman, J.E.

Electrochemical Society
11 国際会議録 Formation of High-Resistivity Silver-Silicon Dioxide Composite Thin Films Using Sputter Deposition

Shover, Ann Marie, Harper, James M. E., Dellas, Nicholas S., MoberlyChan, Warren J.

Materials Research Society
6 国際会議録 Critical issues in SiGe on thin film silicon on sapphire for high performance room temperature CMOS technology

Dubbelday, W B, On, J, Lagnado, I, Kavanagh, K, Walker, H, Chu, J, Meyerson, B

Electrochemical Society
12 国際会議録 PROXIMITY RECOVERY LAYERS TO SPEED UP THE RECOVERY OF STRESSED AMORPHOUS SILICON THIN-FILM TRANSISTORS

Hack, M., Jackson, W. B., Lujan, R.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12