Accommodating Copper Metallization in a Combined Semiconductor Development and Manufacturing Facility

Accommodating Copper Metallization in a Combined Semiconductor Development and Manufacturing Facility

著者名:

掲載資料名:

Environmental issues in the electronics/semiconductor industries and electrochemical/photochemical methods for pollution abatement

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

98-5

発行年:

1998

開始ページ:

41

終了ページ:

57

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771993 [1566771994]

言語:

英語

請求記号:

E23400/98-5

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013908
シリーズID:	PA00000028
会議名:	International Symposium on Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries ; Symposium on Electrochemical and Photochemical Methods for Chemical Recycling and Pollution Abatement ; Annual Meeting of the Electrochemical Society
回次:	1st ; 1998 ; 193rd
会議開催地:	San Diego, California, USA
会議開催年:	1998.05.00

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