Environmental, Safety and Health Issues Associated with Low Dielectric Constant Films Grown by Chemical Vapor Deposition

Environmental, Safety and Health Issues Associated with Low Dielectric Constant Films Grown by Chemical Vapor Deposition

著者名:

掲載資料名:

Environmental issues in the electronics/semiconductor industries and electrochemical/photochemical methods for pollution abatement

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

98-5

発行年:

1998

開始ページ:

27

終了ページ:

34

出版情報:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771993 [1566771994]

言語:

英語

請求記号:

E23400/98-5

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013908
シリーズID:	PA00000028
会議名:	International Symposium on Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries ; Symposium on Electrochemical and Photochemical Methods for Chemical Recycling and Pollution Abatement ; Annual Meeting of the Electrochemical Society
回次:	1st ; 1998 ; 193rd
会議開催地:	San Diego, California, USA
会議開催年:	1998.05.00

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