A MODEL FOR BLISTERING AND SPLITI'ING OF HYDROGEN IMPLANTED SILICON AND ITS APPLICATION TO SILICON-ON-QUARTZ
- 著者名:
- 掲載資料名:
- Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 98-1(2)
- 発行年:
- 1998
- 開始ページ:
- 1373
- 終了ページ:
- 1384
- 総ページ数:
- 12
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771931 [1566771935]
- 言語:
- 英語
- 請求記号:
- E23400/98-1
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Materials Research Society |
Electrochemical Society |
Materials Research Society |
Materials Research Society |
Electrochemical Society |
Materials Research Society |
Materials Research Society |
Electrochemical Society |
12
国際会議録
Progress in silicon-to-silicon direct bonding and its application to synchrotron x-ray optics
SPIE-The International Society for Optical Engineering |