Bondability and Surface Roughness of Ultra-Thin Single Crystal Silicon Wafers
- 著者名:
Beggans, M. Farmer, K. Federici, J. Digges, T.G., Jr. Garofalini, S. Hensley, D. - 掲載資料名:
- Proceedings of the Fourth International Symposium on Semiconductor Wafer Bonding : science, technology, and applications
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 97-36
- 発行年:
- 1997
- 開始ページ:
- 64
- 終了ページ:
- 71
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771894 [1566771897]
- 言語:
- 英語
- 請求記号:
- E23400/97-36
- 資料種別:
- 国際会議録
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