EFFICIENCY OF OZONATED DI WATER IN REMOVING ORGANIC CONTAMINATION
- 著者名:
Kenens, C. De Gendt, S. Knotter, D.M. Loewenstein, L.M. Meuris, M. Vandervorst, W. Heyns, M.M. - 掲載資料名:
- Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 97-35
- 発行年:
- 1997
- 開始ページ:
- 247
- 終了ページ:
- 255
- 総ページ数:
- 9
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771887 [1566771889]
- 言語:
- 英語
- 請求記号:
- E23400/97-35
- 資料種別:
- 国際会議録
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