Deposition of Hydrogenated Carbon Film in a Magnetically Confined RF CH4/H2 Plasma
- 著者名:
Kurashima, N. Akita, K. Kurata, T. Shinoda, H. Minemura, S. Mutsukura, N. - 掲載資料名:
- Proceedings of the Fifth International Symposium on Diamond Materials
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 97-32
- 発行年:
- 1997
- 開始ページ:
- 189
- 終了ページ:
- 196
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771856 [1566771854]
- 言語:
- 英語
- 請求記号:
- E23400/97-32
- 資料種別:
- 国際会議録
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4
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