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W and WSi-2 Deposition by the Reaction of Poly-Crystalline Si and WF6

著者名:
Schaffnit, C.
Sabuoret, E.
Van der Jeugd, C.V.
Oosterlaken, T.G.M.
Jansen, G.C.A.M.
Radelaar, S.
さらに 1 件
掲載資料名:
Proceedings of the Symposium on Interconnect and Contact Metallization
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
97-31
発行年:
1997
開始ページ:
47
終了ページ:
55
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771849 [1566771846]
言語:
英語
請求記号:
E23400/97-31
資料種別:
国際会議録

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