Furnace Silicon Oxynitridation in Nitrous Oxide Ambients
- 著者名:
- 掲載資料名:
- Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 97-25
- 発行年:
- 1997
- 開始ページ:
- 1364
- 終了ページ:
- 1371
- 総ページ数:
- 8
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771788 [1566771781]
- 言語:
- 英語
- 請求記号:
- E23400/97-25
- 資料種別:
- 国際会議録
類似資料:
American Institute of Chemical Engineers |
MRS-Materials Research Society |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
American Institute of Chemical Engineers |
American Institute of Chemical Engineers |
10
国際会議録
The Early Oxynitridation Stages of Hydrogen-Terminated Single-Crystalline Silicon in N2O Ambient
Materials Research Society |
Materials Research Society |
Electrochemical Society |
Materials Research Society |
SPIE-The International Society for Optical Engineering |