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Investigation of salicide processes for thin film SOI microwave applications

著者名:
Chen, J.
Colinge, J.P.
Flandre, D.
Gillon, R.
Raskin, J.P.
Vanhoenacker, D.
さらに 1 件
掲載資料名:
Proceedings of the Eighth International Symposium on Silicon-on-Insulator Technology and Devices
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
97-23
発行年:
1997
開始ページ:
98
終了ページ:
103
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771764 [1566771765]
言語:
英語
請求記号:
E23400/97-23
資料種別:
国際会議録

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