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High-Rate Etching of Metals for Magnetoelectronic Applications

著者名:
Pearton, S.J.
Jung, K.B.
Hong, J.
Lee, J.W.
Caballero, J.A.
Childress, J.R.
Jenson, M.
Hurst, A.T., Jr.
さらに 3 件
掲載資料名:
Proceedings of the Twenty-Seventh State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVII)
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
97-21
発行年:
1997
開始ページ:
270
終了ページ:
285
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771498 [1566771498]
言語:
英語
請求記号:
E23400/97-21
資料種別:
国際会議録

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