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Analysis of Interface States in Electrical Stressed Oxynitrided Gate Oxide Using Quasi-Static and Deep level Transient Spectroscopy Measurements

著者名:
Belkouch, S.
Nguyen, T.K.
Landsberger, L.M.
Aktik, C.
Jean, C.
Kahrizi, M.
さらに 1 件
掲載資料名:
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
97-10
発行年:
1997
開始ページ:
565
終了ページ:
576
総ページ数:
12
出版情報:
Pennington, New Jersey: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771375 [1566771374]
言語:
英語
請求記号:
E23400/97-10
資料種別:
国際会議録

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