The Search for Cathode and Anode Traps in High-Voltage Stressed Sillicon Oxides
- 著者名:
Chen, L. Kang, C.S. Oralkan, O. Dumin, D.J. Brown, G.A. Bellutti, P. - 掲載資料名:
- Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 97-10
- 発行年:
- 1997
- 開始ページ:
- 88
- 終了ページ:
- 98
- 総ページ数:
- 11
- 出版情報:
- Pennington, New Jersey: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771375 [1566771374]
- 言語:
- 英語
- 請求記号:
- E23400/97-10
- 資料種別:
- 国際会議録
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11
国際会議録
VOLTAGE, FLUENCE, AND POLARITY DEPENDENCE OF TRAP GENERATION INSIDE OF THIN SILICON OXIDE FILMS
Materials Research Society |
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