Fabrication of Ultrashort Vertical MOS-Transistors

Fabrication of Ultrashort Vertical MOS-Transistors

著者名:

Aeugle, T.

掲載資料名:

ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

97-3

発行年:

1997

開始ページ:

561

終了ページ:

570

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771306 [1566771307]

言語:

英語

請求記号:

E23400/970512

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013864
シリーズID:	PA00000028
会議名:	International Symposium on Ultralarge Scale Integration Science and Technology
回次:	6th
会議開催地:	Montreal, Quebec, Canada
会議開催年:	1997.05.05-1997.05.09

類似資料:

1 国際会議録 Comparison of partially and fully depleted SOI transistors down to the sub 50-nm-gate length regime Dreeskornfeld, L., Hartwich, J., Landgraf, E., Luyken, R.J., Roesner, W., Schulz, T., Staedele, M., Schmitt-Landsiedel, … Electrochemical Society	7 国際会議録 *RAPID THERMAL CHEMICAL VAPOR DEPOSITION OF GERMANIUM AND GERMANIUM/SILICON ALLOYS ON SILICON: NEW APPLICATIONS IN THE FABRICATION OF MOS TRANSISTORS Ozturk, M. C., Grider, D. T., Ashburn, S. P., Sanganeria, M., Wortman, J. J. Materials Research Society
2 国際会議録 Laser-assisted MOS/SOS transistor fabrication Hess, L.D., Kokorowski, S.A., Olson, G.L., Chi, Y.M., Gupta, A., Valdez, J.B. North Holland	8 国際会議録 Fabrication of AIGaN/GaN high-electron-mobility transistors Wu, T., Hao, Z.B., Guo, W.-P., Wu, S.-W., Luo, Y., Zeng, Q.-M., Li, X.-J. SPIE-The International Society for Optical Engineering
3 国際会議録 Mix-and-match lithography processes for 0.1-ｦﾌm MOS transistor device fabrication Yew,J.-Y., Chen,L.-J., Nakamura,K., Chao,T.-S., Lin,H.-C. SPIE-The International Society for Optical Engineering	9 国際会議録 A Diffusion of Positrons by an Electric Field in MOS Transistors Uedono,A., Wei,L., Tabuki,Y., Kondo,H., Tanigawa,S., Ohji,Y. Trans Tech Publications
4 国際会議録 Wafer warp caused by thick film resists acting as a permanent part of the device R. Leuschner, M. Franosch, T. Dow Society of Photo-optical Instrumentation Engineers	10 国際会議録 A New Laser Printing Technique for the Fabrication of Thin-Film Transistors Sigmon, T. W., Smith, P. M., Thompson, M. O., Toet, D. Materials Research Society
5 国際会議録 Hybrid MOS-Gated Bipolar Transistor Using 4H-SiC BJT Tang, Y., Chow, T.P., Agarwal, A.K., Ryu, S.-H., Palmour, J.W. Trans Tech Publications	11 国際会議録 MOS Transistor Scaling Challenges* Bohr, M. Electrochemical Society
6 国際会議録 Hybrid MOS-Gated Bipolar Transistor Using 4H-SiC BJT Tang, Y., Chow, T.P., Agarwal, A.K., Ryu, S.-H., Palmour, J.W. Trans Tech Publications	12 国際会議録 Characterization of miniaturized tensile specimens using micromagnetic techniques Roesner, H., Meyendorf, N. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12