0.5 μm E/D AlGaAs/GaAs Heterostructure Field Effect Transistor Technology with DEFT Threshold Adjust Implant
- 著者名:
Baca, A.G. Sherwin, M.E. Zolper, J.C. Shul, R.J. Briggs, R.D. Heise, J.A. Robertson, P.J. Hafich, M.F. - 掲載資料名:
- Proceedings of the twenty-sixth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVI)
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 97-1
- 発行年:
- 1997
- 開始ページ:
- 186
- 終了ページ:
- 189
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771283 [1566771285]
- 言語:
- 英語
- 請求記号:
- E23400/970510
- 資料種別:
- 国際会議録
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