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In-Situ O-Plasma Passivation Effect on Poly-Si TFTs During Ion Plating Capping Oxide

著者名:
掲載資料名:
Proceedings of the Third Symposium on Thin Film Transistor Technologies
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
96-23
発行年:
1996
開始ページ:
59
終了ページ:
66
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771733 [1566771730]
言語:
英語
請求記号:
E23400/970103
資料種別:
国際会議録

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