Differences between n and p-Type Substrates in the Electrochemical Platinum Deposition on Silicon

Differences between n and p-Type Substrates in the Electrochemical Platinum Deposition on Silicon

著者名:

掲載資料名:

Proceedings of the Third Symposium on Electrochemically Deposited Thin Films

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

96-19

発行年:

1996

開始ページ:

125

終了ページ:

135

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771696 [1566771692]

言語:

英語

請求記号:

E23400/970102

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013853
シリーズID:	PA00000028
会議名:	Symposium on Electrochemically Deposited Thin Films ; Fall Meeting of the Electrochemical Society
回次:	3rd ; 1996
会議開催地:	San Antonio, Texas, USA
会議開催年:	1996.10.06-1996.10.11

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